Until 2018, DRAM peripheral transistors were predominantly made in planar logic MOSFET technology with poly-Si/SiO 2 or ...
In DRAM chips, besides access transistors, peripheral transistors must meet stringent requirements which preclude a ...
Ingots are sliced into wafers just a few millimeters thick, lapped and polished to a flawless mirror shine, and then etched with functional patterns (such as resistors, transistors, and capacitors ...
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