Lithographic techniques with superior resolution, such as e-beam lithography, are limited to producing high-aspect-ratio 2D structures. Two-photon polymerization was first demonstrated in the ...

Recent research has focussed on two-photon lithography, which uses a resin that is largely transparent to the wavelength of light concerned, but critically, can be polymerized with enough energy ...

Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to ... transistors on an integrated circuit chip would double every two years 1. The semiconductor industry has maintained this rate ...