Overall, the advancements in nanoimprint lithography and structural color fabrication are paving ... human feedback on the overall quality of the process. We however cannot guarantee the accuracy ...

This enables the EUV lithography era of today, which is likely to continue for the foreseeable future. Initially, EUV became ...

CDU is a major contributor to yield drop out in deep sub micron technologies and a big concern to the lithography process. Both the Intra field and the inter field type of CD variations can be ...